MPI TS300-SE Probe System
The MPI TS300-ShielDEnvironment™ (TS300-SE) is designed to ensure advanced EMI/RFI/light-tight shielding, ultra-low noise, low leakage measurement capabilities on 300 mm wafer in a temperature range from -60 to +300°C.
In addition, it can be configured with light curtain safety system as TS300-HP for dedicated High-Power measurements up to 10 kV / 600 A or with MPI IceFreeEnvironment™ to become a probe station for Design Validation (Product Engineering) supporting long customized probe cards up 15” length and probing with MicroPositioners (active impedance probes) simultaneously.
It’s incorporated with vibration isolation table at optimal height to make the daily operation very convenient.
MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.
Unique Upgrade Path
The modular design of the TS300-SE modular creates a unique upgrade path. All TS300-SE probing accessories, such as thermal chucks, microscope and positioners, can be upgraded or reconfigured to variety of application requirements covering tool lifespan for increasingly low cost of ownership.
The MPI TS300-SE probe systems with ShielDEnvironment™ provides maximum EMI shielding and allows for low noise device on-wafer measurements for wide verity of applications such as Device Characterization and Modeling, RF/Microwave, Wafer Level Reliability, Failure Analysis, Design Validation, and High Power.
Various Optic Options
MPI Optics are available with a choice between a single tube MPI SuperZoom™ SZ10, the MegaZoom™ MZ12 with up to 12x optical zoom and more than 42 mm working distance or EyeZoom™ EZ10 – the 10x optical zoom optic with ergonomic 20x eyepieces, 90 mm working distance and down to 2 µm optical resolving power.
ERS Patented AC3 Cooling Technology Incorporated
These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from “already used” air – reducing dry air consumption up to 30 to 50% as compared to other systems on the market.
Thermal Control Integration
The wafer loading door is locked at any temperature below 15°C – this unique feature makes the TS300-SE the safest manual probe station in the market.
Furthermore, the thermal chuck can be operated via the fully integrated touchscreen display, ergonomically mounted in a convenient location on the prober for fast adjustment and immediate feedback.
Various Chuck Options
The TS300-SE is available with various chuck options to meet different budgets and application requirements.
Together MPI and ERS designed the New 300 mm Thermal Chuck AirCool® PRIME Technology family, offering unsurpassed thermal flexibility with reduced soaking time by 60%, and the largest variety of thermal ranges on market.
Reduced transition time, improved electrical performance, easier testing under inert-gas atmosphere, and field upgradability are additional values of the AirCool® PRIME thermal chuck systems.
The Ambient Chucks are available in the following versions: Coaxial, Triaxial or RF with two auxiliary ceramic chucks for accurate stable RF calibration.
Unique Chuck Z Adjustment
TS300-SE incorporates in addition to the air bearing XY stage – 5 mm Z chuck adjustment in µm resolution for fine and accurate contact / over-travel control or probe cards drop tip correction.
A 1 mm scale indicator provides easy feedback to the operator. 20 mm pneumatic lift in addition offers easy and continent loading / unloading procedure.
Unique Platen Lift with Probe Hover Control™
The repeatable (1 μm) platen lift design has three discrete positions for contact, separation (300 μm), and loading (3 mm). The lift includes a safety lock rotation utility which prevents accidental platform descent. These features offer unparalleled functionality and are standard offerings for the MPI TS300-SE manual probe system. Prevention of unexpected probe or wafer damage is critical to system design and provides intuitive control, accurate contact positioning, safe set-ups, and easy step and repeat functionality.
Additional Probe Hover Control™ comes with hover height (50, 100 or 150 μm) for easy and convenient probe to pad alignment.
The TS300-SE has a unique stage concept combining MPI air-bearing stage design, with simple one handed puck control, provides incredibly convenient operation for fast XY navigation and quick wafer loading with the accurate and fine positioning capability in addition over the entire travel range. Please check the unique Z chuck control in addition.
A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.
Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.
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