TS3500 Series
TS3500 Series with WaferWallet® = Accuracy + Flexibility + Automation
TS3500 and TS3500-SE are equivalent in features to MPI’s well-known and established TS3000 and TS3000-SE 300 mm probe stations with the added fully-automated capability by configuring or upgrading with MPI’s unique WaferWallet® or WaferWallet®MAX. MPI’s solution is lowering the customer’s overall cost-of-test by providing full automation for less than other vendor’s semi-automated products.
It incorporates MPI advanced technologies, such as PHC™, as a standard feature, and mDrive™ and/or VCE™ optional or as an upgrade in the field.
The WaferWallet®
Common practice for Device Characterization in the Modeling and New Technology Development processes is to extract data from a typical few wafers via extremely accurate IV-CV, 1/f, RF, mmW, and Load-pull measurements.
MPI’s WaferWallet® extends the TS3500 series automation without compromising measurement capability. The WaferWallet® is designed with five individual trays for manual, ergonomic loading of 150, 200, or 300 mm “modeling” wafers. Fully-automated tests with up to five identical wafers at different temperatures are now possible.
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Hot and Cold Wafer’s Swapping
Returning the chuck to ambient is no longer required during the wafer loading and unloading process. With the WaferWallet®, MPI provides valuable time savings via a unique capability of load/unloading wafers while the chuck remains at any test temperature.
Test Automation
Simple and cost-effective manual in-tray wafer alignment via notch indicator makes initial wafer loading fast and reliable. Dependent upon operational methodology, other options include wafer Pre-aligner, ID reader or PTPA capability on the TS3500-SE are additional features increasing levels of automation.
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SENTIO® Dashboard
MPI’s SENTIO® 3.0 Software Suite with advanced GUI design is based on the revolutionary patented technologies:
- Multi-touch, intuitive operation
- Single window GUI, like common mobile devices
- Dashboard view of the system status for simplified navigation
- Intelligent, predictable operational guidance
- Free upgrades for the life of the probe station
With a simple view of the WaferWallet®Dashboard, the operator can recognize the loaded or empty trays, wafer diameter (150 or 200 or 300 mm), flat/notch orientation, wafer ID (if applicable), percentage of WaferMap tested and much more.
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