MPI TS150-THZ Engineering Wafer Probe System


MPI TS150-THZ engineering wafer probe system is a cost effective yet highly accurate manual probe system designed for precision analysis of substrates and 150 mm wafers. The TS150-THZ may be configured to support a wide variety of RF and millimeter wave (mmW) applications such as broadband up to 110 GHz, banded wave guide, sub-THz, load-pull and RF noise.


The dedicated and rigid platen design accommodates two MP80 mmW MicroPositioners in east-west configuration. Four port RF measurements or DC biasing is easy possible.


The highly repeatable platen lift design with three discrete positions for contact, separation, and loading with a safety lock utility allows for easy step and repeat functionality.


The TS150-THZ is available with various chuck options to meet different budgets and application requirements such as MPI's standard RF or dedicated mmW Chucks which includes two auxiliary chucks built in ceramic material for accurate RF calibration. Chuck elevation option is obtainable for sub-THz configurations.


A dedicated Optics are available with a choice between a single tube MPI SuperZoom SZ10 or the MegaZoom MZ12 with up to 12x optical zoom and more than 45 mm working distance. The small factor of such microscopes is ideal for RF and mmW applications due to space restrictions inherent with the integration of test heads/tuners requiring shortest distance to DUT.


The TS150 modular design concept allows a unique upgrade path towards reduced cost of ownership.

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