MPI TS3000-SiPH Automated Probe System for characterizing silicon photonics devices

The TS3000-SiPH from MPI is an automated 300 mm probe system, specifically designed for characterizing silicon photonics devices.


The TS3000-SiPH feature set provides:

  • High precision fiber alignment systems with maximum flexibility for single or fiber arrays in a dual or single positioner setup
  • Safest operation by including wafer to fiber proximity detection and fiber collision prevention
  • Recommended device test temperature from -40…100°C; System capability -60…300°C
  • Minimizing the system footprint by integrating additional silicon photonics instrumentation in a dedicated measurement shelf




Fact Sheet


Data Sheet


Variety of fiber positioning stages and related software can be easily used with the TS3000-SiPH probe system. The shortest platen to chuck distance allowing shorter fiber arms with higher stability and less measurement noise. Solutions for just single fiber or multi-fiber-arrays are available, all integrated with automated Z-sensing unit for constant distance of few micrometer to the optical I/O.

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