Automated Wafer Probe Station

The TS2000 is an automated probe station which can be configured with ambient to hot chucks up to 300°C.


The TS2000-SE is an advanced probe station equipped with an automated single wafer loader which can be configured for temperature ranges from -60 °C to +300 °C.


SE stands for MPI ShielDEnvironment™, which is a local environment chamber providing an excellent EMI and light-tight shielding for ultra-low noise measurements.

Please contact us
Address: Heilbronner Str. 17, 01189 Dresden, Germany
Phone: +49 (0) 351 2138640
Fax: +49 (0) 351 2138650
© 2020 AutomatisierungsTechnik Voigt GmbH
First Contact in Measurement Technology

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